题目：MEMS Resonators for Radio Frequency and Mobile Phone Application
报告人：Dr. Johnny HE  Han, Institute of Microelectronics, A*STAR, Singapore
时间：2009年11月6日下午3:30
地点：教三441

Abstract:
Microelectromechanical Systems (MEMS) technology derived from semiconductor IC industry, developed  dramatically to produce inkjet, micro-mirror, accelerometers and other micro-devices in the past 20 years. MEMS becomes fairly attractive due to the advantage of batch processing to address the low cost, high-volume manufacturing and high performance requirements by the industry. This talk starts with market study and analysis of RF MEMS and resonators, and followed by studying the frequency drift due to the material property change of the resonators in different temperature. SiO2 with positive temperature coefficient of Young’s modulus is used to balance the effect from Si with negative counterpart. The SiO2 / Si ratio is obtained by studying simple cantilever resonators with different degree of oxidation. Based on this, we developed simple silicon resonators by wafer-level packaging. The vacuum level inside the packaging cavity and the quality factor of the resonator are also discussed. Some other applications of resonators are also discussed briefly.

Bibliography:
Dr. Johnny H. He received his Ph.D. in MEMS Engineering from Cambridge University, UK, in 2004. He also holds the  M.Sc.Degree in Advanced Material in Micro-/Nano- System from NUS and MIT of Singapore-MIT Alliance, and B.Eng in Electrical Engineering from Shanghai Jiao Tong University,  China. He is currently working as a Senior Research Engineer in the Institute of Microelectronics, Agency of Science, Technology and Research (A*STAR), Singapore. He has authored or co-authored about 40 international journal and conference papers. He is also a reviewer for IEEE Transactions on Biomedical Engineering, Journal of Vacuum Science and Technology B, IEEE Journal of MEMS, and Applied Physics Letters. He is an A*STAR and MOE( Ministry of Education) Grant reviewer for multi-million grant proposals. He is also representing A*STAR/IME to be the Judge of Singapore Science and Engineering Fair, and Judge of National Science Challenge of Singapore during the past several years.

Dr. He’s major research interest is in micro-fabrication, characterization, design and simulation of advanced microsystem.