Zhejiang University Chinese

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85188020 Microelectronics Fabrication(B)

Editor: Date:2019-03-13 Hits:68

This course teaches microelectronics technology, including: microelectronics process and principles, process design and parameter selection.Involved in the process environment and substrate preparation, film preparation, doping technology, lithography and etching, and metallization.The course is integrated into theory and practice. The course is interspersed with a proper amount of experimental links to enhance students' practical ability and consolidate theoretical knowledge.It is a course that must be understood by microelectronics and integrated circuit design and manufacturing personnel.

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