Thin film electronics is the bedrock of microelectronics and optoelectronics industries. It is widely used in information storage, MEMS, photovoltaic devices, and micro/nano science. As the trend for miniaturization of electronic devices moves into the nano scale domain, the reliability of thin films becomes an increasing concern. This course is designed to provide a combination of scientific and engineered knowledge of thin film electronics, such as vacuum science & technology, evaporation, plasmas discharges, sputtering, chemical vapor deposition, epitaxy, film structure & characterization, thin film devices, and reliability analysis.
