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1113255 Modern VLSI Process Technology

Editor:xdx Date:2017-12-14 Hits:46

 Course Introduction

Bipolar and MOS process basic process; semiconductor substrate material preparation and cleaning technology; thin film technology; doping technology; graphic processing technology; metallization; process integration; packaging. semiconductor substrate material preparation and cleaning technology; thin film technology;Graphics processing technology; metallization; process integration; packaging; MEMS, special devices, nano manufacturing processes.

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